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International Journal of Zoology and Applied Biosciences Research Article
Fabrication and characterization of a mems airflow sensor using a free-standing micro-cantilever
Nivedha S, Nirmala B, Lavanya R, Swetha M and Geetha C
Year : 2025 | Pages: 540-542
Received on: 27/09/2025
Revised on: 24/10/2025
Accepted on: 25/11/2025
Published on: 01/12/2025
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Nivedha S, Nirmala B, Lavanya R, Swetha M and Geetha C( 2025).
Fabrication and characterization of a mems airflow sensor using a free-standing micro-cantilever
. International Journal of Zoology and Applied Biosciences, 10( 6), 540-542.
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Abstract
This study presents the design, fabrication, and characterization of a MEMS-based airflow sensor utilizing a free-standing silicon micro-cantilever integrated with piezoresistive detection. The proposed sensor offers high sensitivity, low power consumption, and fast dynamic response, addressing the limitations of conventional thermal airflow sensors. The cantilever structure was optimized using COMSOL Multiphysics to analyze stress distribution, tip displacement, and modal behavior under airflow velocities ranging from 1–15 m/s. The fabricated device demonstrated a linear sensitivity of 0.98 mV/(m/s), a rapid response time of <8 ms, and excellent repeatability with <2% deviation. Experimental validation confirms the sensor’s potential for applications in industrial flow monitoring, HVAC systems, automotive intake sensing, environmental monitoring, and biomedical respiration assessment.
Keywords
MEMS Airflow Sensor, Micro Cantilever, Piezoresistive Sensing, Microfabrication, COMSOL.
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© The Author(s) 2025. This article is published by International Journal of Zoology and Applied Biosciences under the terms of the Creative Commons Attribution 4.0 International License (creativecommons.org), which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.
